Drie相关论文
本文对于V型梁结构微执行器,理论研究表明V型梁的长度、宽度、厚度和初始偏置角度等几何参数对微执行器的性能存在直接影响.在结构......
Microchannel plate(MCP)which is assembled from millions of single-channel electron multiplier(CEM)is the key component o......
In recent years,deep reactive ion etching(DRIE)has become a key process in the fabrication of microelectromechanical sys......
叉指式电容加速度计是一种实用化的MEMS惯性器件,其快速发展更是受到近几年的实际需求的牵动.在MEMS加速度和陀螺等惯性器件的研制......
Objective: To investigate the chemical transformation of volatile compounds in sulfur-fumigated Radix Angelicae Sinensis......
This paper presented an experimental study on convective drying of waste water sludge collected from Beijing GaoBeiDian ......
Preparation and characterization of Mo-Cu nanocomposite powders by chemical liquid reduction process
A novel chemical liquid reduction process was employed to prepare nanosized Mo-Cu powders.The precipitates were first ob......
[Objective]To investigate the feasibility of Viola inconspicus Bl.using as the plant origin of HERBA VIOLAE.[Methods]L9(......
This paper describes a new formulation of magnetic nanoparticles coated by a novel polymer matrix-O-Carboxylmethylated C......
The protected tetrapeptide, N-o-Ns-N(Me)-Val-N(Me)-Val-N(Me)-Val- N(Me)-Phe-O~tBu, was prepared from L-valine and L-phen......
Six tea plantations with different soil-forming parent materials, the same tea variety and tea age and similar landforms......
A novel caged-prenylxanthone xanthone,neobractatin(1),was isolated from the twig of Garcinia bracteata.Its structure was......
Large-scale Patterning of Hydrophobic Silicon Nanostructure Arrays Fabricated by Dual Lithography an
We describe a simple but efficient technique to fabricate large-scale arrays of highly ordered silicon nanostructures. B......
太赫兹技术将在未来高精度频谱探测技术、高分辨率成像和高性能通讯等应用前景良好。太赫兹技术处于电子学与光子学领域的交叉领域......
介绍了一种刻蚀效果良好的PZT铁电薄膜反应离子刻蚀方法。利用深反应离子刻蚀设备研究了反应离子刻蚀中刻蚀气氛、刻蚀功率及刻蚀......
研究了锆钛酸铅（PZT）薄膜的深槽反应离子刻蚀（DRIE）技术。首先,对比了3种工艺气氛条件下（SF6/Ar、CF4/Ar和CHF3/Ar）刻蚀PZT的效果。实验......
为了提高MEMS执行器件对面内运动位移（或力学信号）检测的灵敏度并改善侧壁检测电阻制作工艺与其他工艺及其不同器件结构之间的兼容性......
在高密度反应离子刻蚀技术中,存在明显的线宽损失,对小尺寸MEMS结构影响很大,将使MEMS器件灵敏度下降,稳定性降低.本文介绍了一种......
MEMS(Micro Electro Mechanical Systems,微机电系统)是基于微电子加工技术,汇集了电子、机械、材料、制造、测量,以及物理、化学......
风速的测量不仅在航天航空、科研实验上不可或缺,更与人们的生活、工农业生产密不可分。目前,在风速风向测量方面,风杯、风向标是......
设计并实现了一种采用微机械制造(MEMS)技术加工的D波段矩形波导膜片滤波器.采用有限元仿真软件HFSS分析了滤波器内腔镀膜厚度、粗......
地震勘探是矿产能源勘探的主要方法,实现地震勘探的主要设备是加速度传感器。随着勘探精度要求的提高以及深层地质结构的影响,传统......
